Digital Magnetic Bearing Turbo Molecular Pump UTM-FH/FW Series
Possible response to centralized management systems through digitalization. [ULVAC]
This is a turbo molecular pump with a composite wing design that employs digital 5-axis controlled magnetic bearings. The UTM-FH and UTM-FW achieve advantages such as high functionality, high reliability, and energy-saving capabilities due to the adoption of digital 5-axis controlled magnetic bearings. The FH series is designed for light to middle processes with high back pressure and high compression ratios, while the FW series is suitable for wide-range, high-flow applications for high-load processes and middle to hard processes. 【Features】 ○ Equipped with monitoring and self-diagnosis functions, as well as communication capabilities, enabling compatibility with centralized management systems through digitalization. ○ Incorporates a coupling-free system, allowing operation in combination with registered pump bodies using a single power supply by switching models. ○ Features a speed variable system, allowing exhaust speed to be adjusted within a range of 25% to 100%. ○ With excellent corrosion-resistant surface treatment, special surface treatment and internal heating systems are available as options for more demanding processes (FW series). ○ Adopts a destructive energy absorption structure, designed for high safety by minimizing equipment damage during malfunctions. For more details, please contact us or download the catalog.
- 企業：アルバック／ULVAC, Inc.
- 価格：Other
